CMOS Integrated Carbon-based Nano Electromechanical Components
- Reference number
- A3 02:146
- Start and end dates
- 030101-081231
- Amount granted
- 10 000 000 SEK
- Administrative organization
- Göteborg University
- Research area
- Information, Communication and Systems Technology
Summary
The aims for the SSF based program NEMS is to integrate carbon-based nano-electro-mechanical systems (NEMS), such as carbon nanotubes (CNT) and fullerene molecules, into silicon CMOS technology, in order to fabricate, analyse and further develop novel nano-electro-mechanical devices, that can be used for information processing. The operational principle of NEMS relies on electromechanical couplings, originated from Coulomb forces, caused by electric charge redistribution on the near-molecular level. Such devices allow for an unprecedented level of integration and for operational speeds rivalling the ultimate limits of CMOS technology. Due to the inherently large operating frequencies and small power consumption, NEMS devices can be used interchangeably either as logical switches or bi-stable memory elements, enabling a large degree of multi-functionality. The proposed devices are exemplified by two basic structures: a nanotube based nanorelay, and a fullerene-based shuttle. Both fundamental research and technological studies connected to design, fabrication and optimisation of device operation, are performed in close collaboration between four groups at Chalmers University and Göteborg University.