LowTemperture Thin Film Synthesis
- Reference number
- A3 00:76
- Start and end dates
- 000101-051231
- Amount granted
- 33 000 000 SEK
- Administrative organization
- Linköping University
- Research area
- Materials Science and Technology
Summary
In the programme, researchers try to understand and control the entire process, from where an atom and/or radical is formed in a layer source through its transport phase to its final incorporation in a growing film. The aim is to take a leading position in the world in basic research on the synthesis of thin film from the gas phase at relatively low temperatures, develop new materials, produce surface layers on an atomic scale and develop processes that are relevant to industry.